Ihe mmetụta nrụgide injin 2cp3-68 1946725 maka carter

Usoro maka ịkwadebe ihe mmetụta nrụgide, nke e ji mara usoro ndị a:

S1, na-enye wafer na azụ na ihu n'ihu; Na-akpụ mpempe achịcha na-acha uhie uhie na mpaghara kọntaktị dị larịị nke wafer; Na-akpụ oghere ndagide dị omimi site na itching azu nke wafer;

S2, jikọta mpempe akwụkwọ nkwado na azụ wafer;

S3, na-arụpụta oghere na eriri ọla na ihu nke wafer, ma jikọta paịlịkirive condesisive iji mepụta akwa akwa wittone;

S4, na-etinye ma na-akpụzi onye na-aga n'ihu na ihu wafer, ma na-emeghe akụkụ nke inter passivation a na-etolite mpaghara. 2. A na-eji ion: A na-eji ion na-eji ihu ala wafer, a na-eji usoro ọdịiche dị elu dị elu, na mpaghara ndị na-achasi ike; S13: Depositing na -echekwa mkpuchi na-echebe n'elu wafer; S14: etching na -eme ka oghere miri emi na azu nke wafer ka imeputa ihe nkiri. 3. Thezọ na-emepụta ihe nke ihe mmetụta nrụgide dị ka ị ga-esi kwuo 1, ebe wafer bụ soi.

N'afọ 1962, tufte et al. Emepụtara ihe mmetụta nrụgide siri ike na-agbasa silicon siliresistive congring na silicon ihe nkiri na-eme nke mbụ, wee malite nyocha na ihe mmetụta nrụgide siri ike. N'ọgwụgwụ afọ 1960 na mbido 1970s, ọdịdị nke teknụzụ atọ, nke teknụzụ na-arụ ọrụ nrụgide, nke na-arụ ọrụ dị mkpa na imezi arụmọrụ nke ihe mmetụta nrụgide. Kemgbe 1980s, na-enwekwu mmepe nke teknụzụ micromachinain, dị ka aniototropic etching, a na-eme ka ọ dị mma, na-eme ka ọ dị mma, na mmepụta dị elu na arụmọrụ dị oke mma. N'otu oge ahụ, mmepe na itinye teknụzụ micromechinaning ọhụrụ na-eme ka ihe nkiri nke nrụgide nke nrụgide nke na-achịkwa ya n'ụzọ ziri ezi.