Ihe mmetụta nrụgide nke injin 2CP3-68 1946725 maka onye na-egwupụta Carter

Usoro maka ịkwadebe ihe mmetụta nrụgide, nke nwere usoro ndị a:

S1, na-enye wafer na azụ azụ na ihu ihu; Ịmepụta eriri piezoresistive na mpaghara kọntaktị doped nke ukwuu n'ihu ihu wafer; Ịmepụta oghere dị omimi nke nrụgide site na itching azụ azụ nke wafer;

S2, na-ejikọta mpempe akwụkwọ nkwado na azụ nke wafer;

S3, na-emepụta oghere ụzọ na waya ígwè n'akụkụ ihu nke wafer, na ijikọ piezoresistive ibe iji mepụta akwa Wheatstone;

S4, na-edobe na-akpụ a passivation oyi akwa n'ihu elu nke wafer, na-emeghe akụkụ nke passivation oyi akwa na-etolite a metal pad ebe. 2. Usoro mmepụta nke ihe mmetụta nrụgide dị ka nkwupụta 1 si kwuo, nke S1 na-agụnye kpọmkwem usoro ndị a: S11: na-enye wafer na azụ azụ na ihu ihu, na ịkọwa ọkpụrụkpụ nke ihe nkiri na-emetụ n'ahụ na wafer; S12: a na-eji ntinye ion mee ihe n'ihu ihu nke wafer, a na-emepụta ihe ntanetị nke piezoresistive site na usoro mgbasa ozi dị elu, na mpaghara kọntaktị na-eme ka ọ dị elu; S13: ntinye na ịmepụta oyi akwa mkpuchi n'ihu ihu nke wafer; S14: etching na-akpụ a nrụgide miri oghe oghere na azụ nke wafer na-etolite a nrụgide mmetụta. 3. Usoro nrụpụta nke ihe mmetụta nrụgide dị ka nkwupụta 1 si kwuo, ebe wafer bụ SOI.

Na 1962, Tufte et al. rụpụtara ihe mmetụta nrụgide piezoresistive nwere mpempe silicon piezoresistive gbasasịrị na nhazi ihe nkiri silicon maka oge mbụ, wee malite nyocha na ihe mmetụta nrụgide piezoresistive. N'ọgwụgwụ 1960s na mmalite 1970s, ọdịdị nke teknụzụ atọ, ya bụ, silicon anisotropic etching technology, ion implantation technology na anodic bonding technology, wetara nnukwu mgbanwe na ihe mmetụta nrụgide, nke rụrụ ọrụ dị mkpa n'ịkwalite arụmọrụ nke ihe mmetụta nrụgide. . Ebe ọ bụ na 1980s, na n'ihu mmepe nke micromachining technology, dị ka anisotropic etching, lithography, diffusion doping, ion implantation, bonding na mkpuchi, size nke nrụgide mmetụta na-anọgide na-ebelata, na uche ka mma, na mmepụta dị elu na arụmọrụ dị mma. N'otu oge ahụ, mmepe na ntinye nke teknụzụ micromachining ọhụrụ na-eme ka ọkpụkpụ ihe nkiri nke ihe mmetụta nrụgide na-achịkwa nke ọma.