Nhazi nke ihe mmetụta Piezoresistive

N'ime ihe mmetụta a, a na-ejikọta eriri resistor na monocrystalline silicon diaphragm site na ntinye usoro iji mepụta mgbawa silicon piezoresistive, na akụkụ nke mgbawa a na-edozi ya na shei ahụ, a na-edugakwa electrode. Ihe mmetụta nrụgide piezoresistive, nke a makwaara dị ka ihe mmetụta nrụgide steeti siri ike, dị iche na nlele nrapado, nke kwesịrị inwe mmetụta ike mpụga n'ụzọ na-apụtaghị ìhè site na ihe na-agbanwe agbanwe, mana na-enwe mmetụta ahụ ozugbo site na silicon diaphragm.

Otu akụkụ nke diaphragm silicon bụ oghere nrụgide dị elu na-ekwurịta okwu na nrụgide a tụrụ atụ, na akụkụ nke ọzọ bụ oghere dị ala na-ekwurịta okwu na ikuku. N'ozuzu, a na-emepụta diaphragm silicon dị ka okirikiri nke nwere akụkụ dị iche iche, na nha nke dayameta ka ọ dị ihe dị ka 20 ~ 60. A na-ekesa eriri anọ P na-adịghị ọcha na mpaghara na diaphragm silicon diaphragm ma jikọta ya na akwa mmiri zuru oke, abụọ n'ime ha. nọ na mpaghara nrụgide nrụgide na abụọ ndị ọzọ nọ na mpaghara nrụgide tensile, bụ nke dị n'etiti etiti diaphragm.

Na mgbakwunye, e nwekwara square silicon diaphragm na silicon kọlụm sensọ. A na-emekwa ihe mmetụta silicon cylindrical nke mgbochi mgbochi site na mgbasa n'akụkụ ụfọdụ nke ụgbọ elu kristal nke silicon cylinder, na ibe abụọ na-egbochi nrụgide nrụgide na ibe abụọ na-egbochi nrụgide na-etolite akwa mmiri zuru oke.

Ihe mmetụta piezoresistive bụ ngwaọrụ emere site na nguzogide mgbasa na mkpụrụ nke ihe semiconductor dabere na mmetụta piezoresistive nke ihe semiconductor. Enwere ike iji mkpụrụ ya mee ihe ozugbo dị ka ihe mmetụta nha, yana nguzogide mgbasa na jikọtara ya na mkpụrụ n'ụdị akwa mmiri.

Mgbe mkpụrụ ahụ mebiri site na ike mpụga, ụkpụrụ nguzogide ga-agbanwe na akwa ga-emepụta mmepụta na-enweghị isi. Mgbochi (ma ọ bụ diaphragms) eji dị ka ihe mmetụta piezoresistive bụ nke kachasị silicon wafers na germanium wafers. Silicon piezoresistive sensọ mere nke silicon wafers dị ka ihe ndị nwere mmetụta adọtala nlebara anya karịa, ọkachasị ihe mmetụta piezoresistive steeti siri ike maka ịlele nrụgide na ọsọ bụ nke a na-ejikarị.