Enwere ike kewaa ihe mmetụta nrụgide Semiconductor ụzọ abụọ, otu dabere na ụkpụrụ nke njirimara I-υ nke semiconductor PN junction (ma ọ bụ schottky junction) na-agbanwe n'okpuru nrụgide.Arụmọrụ nke mmewere mmetụta nrụgide a na-akwụsighị ike na emebebeghị nke ukwuu.Nke ọzọ bụ ihe mmetụta nke dabeere na semiconductor piezoresistive mmetụta, nke bụ isi ihe dị iche iche nke semiconductor mgbali sensọ.N'oge mbụ, a na-etinyekarị ihe nrịbama semiconductor na ihe na-agbanwe agbanwe iji mee nrụgide dị iche iche na ihe nrịbama.N'afọ 1960, site na mmepe nke teknụzụ sekit agbakwunyere semiconductor, ihe mmetụta nrụgide semiconductor nwere ihe mgbochi mgbasa dị ka ihe piezoresistive pụtara.Ụdị ihe mmetụta nrụgide a nwere usoro dị mfe na nke a pụrụ ịdabere na ya, ọ dịghị akụkụ ndị na-agagharị agagharị, na nrụgide nrụgide na ihe na-agbanwe agbanwe nke ihe mmetụta na-ejikọta ya, nke na-ezere lag mechanical na creep na-eme ka arụmọrụ nke ihe mmetụta dịkwuo mma.

Mmetụta piezoresistive nke semiconductor Semiconductor nwere njirimara metụtara ike mpụga, ya bụ, resistivity (nke nọchiri anya akara ρ) na-agbanwe na nrụgide ọ na-ebu, nke a na-akpọ mmetụta piezoresistive.A na-akpọ mgbanwe mgbanwe nke resistivity n'okpuru ọrụ nke nrụgide nkeji piezoresistive coefficient, nke e gosipụtara site na akara π.Ekwuru na mgbakọ na mwepụ dị ka ρ/ρ = π σ.

Ebe σ na-anọchi anya nrụgide.Mgbanwe nke uru nguzogide (R / R) kpatara site na nkwụsị nke semiconductor n'okpuru nrụgide na-ekpebikarị site na mgbanwe nke resistivity, ya mere enwere ike dee okwu nke mmetụta piezoresistive dị ka R / R = πσ.

N'okpuru omume nke ike mpụga, a na-emepụta ụfọdụ nrụgide (σ) na strain (ε) na kristal semiconductor, na mmekọrịta dị n'etiti ha na-ekpebi site na Young's modules (Y) nke ihe onwunwe, ya bụ, Y = σ / ε.

Ọ bụrụ na a na-egosipụta mmetụta piezoresistive site na nsogbu na semiconductor, ọ bụ R / R = Gε.

A na-akpọ G ihe mmetụta uche nke ihe mmetụta nrụgide, nke na-anọchite anya mgbanwe mgbanwe nke uru nguzogide n'okpuru eriri otu.

Ihe ngbanwe nke piezoresistive ma ọ bụ ihe nwere mmetụta bụ isi ihe nrịbama anụ ahụ nke mmetụta piezoresistive semiconductor.Mmekọrịta dị n'etiti ha, dịka mmekọrịta dị n'etiti nrụgide na nsogbu, na-ekpebi site na modulus nke Young nke ihe onwunwe, ya bụ, g ​​= π y.

N'ihi anisotropy nke kristal semiconductor na nlasticity, modul Young na piezoresistive coefficient na-agbanwe na ntụgharị kristal.Ọnụ ọgụgụ nke semiconductor piezoresistive mmetụta nwekwara njikọ chiri anya na resistivity nke semiconductor.Na ala nke resistivity, nta ka ihe mmetụta uche.A na-ekpebi mmetụta piezoresistive nke nguzogide mgbasa site na ntụgharị kristal na ntinye adịghị ọcha nke nguzogide mgbasa.Ntinye uche adịghị ọcha na-ezo aka na elu adịghị ọcha nke oyi akwa mgbasa.