Ihe mmetụta nrụgide semiconductor a na-ejikarị na-eji ụdị silicon wafer dị ka mkpụrụ.Nke mbụ, a na-eme wafer silicon ka ọ bụrụ akụkụ na-agbanwe nrụgide nke nwere ụfọdụ geometry.N'akụkụ nke na-akpata nrụgide nke silicon wafer, a na-eme ihe mgbochi ụdị P-ụdị anọ n'akụkụ akụkụ kristal dị iche iche, mgbe ahụ, a na-emepụta akwa mmiri Wheatstone nwere ogwe aka anọ na ndị resistors anọ a.N'okpuru omume nke ike mpụga, mgbanwe nke ụkpụrụ nguzogide na-aghọ akara eletrik.Akwa nkume ọka wheat a nwere mmetụta nrụgide bụ obi nke ihe mmetụta nrụgide, nke a na-akpọkarị piezoresistive bridge (dị ka egosiri na foto 1).E ji mara nke piezoresistive akwa dị ka ndị a: ① ụkpụrụ nkwụsị nke ogwe aka anọ nke akwa ahụ hà nhata (niile r0);② Mmetụta piezoresistive nke ogwe aka dị n'akụkụ nke àkwà mmiri ahụ hà nhata na uru na ihe dị iche na akara;③ Ọnụ ọgụgụ na-eguzogide okpomọkụ nke ogwe aka anọ nke akwa mmiri ahụ bụ otu, ha na-adịkwa n'otu okpomọkụ.Na fig.1, R0 bụ uru nguzogide na-enweghị nchekasị na ụlọ okpomọkụ;RT bụ mgbanwe na-akpata site na ọnụọgụ okpomọkụ nke nguzogide (α) mgbe okpomọkụ gbanwere;Υ Rδ bụ mgbanwe nke nguzogide na-akpata site na nje (ε);Mpụta voltaji nke akwa mmiri bụ u = I0 Δ Rδ=I0RGδ (akwa iyi isi iyi mgbe niile).

Ebe I0 bụ isi iyi dị ugbu a na e bụ voltaji isi iyi mgbe niile.Mpụta voltaji nke piezoresistive àkwà mmiri bụ kpọmkwem proportsions na nsogbu (ε) na ọ dịghị ihe na-eme na RT kpatara okpomọkụ ọnụọgụ nke iguzogide, nke ukwuu na-ebelata okpomọkụ ịkpafu nke ihe mmetụta.Ihe mmetụta nrụgide semiconductor a na-ejikarị eme ihe bụ ihe mmetụta maka ịchọpụta nrụgide mmiri.Ihe nhazi ya bụ isi bụ capsule nke silicon monocrystalline (dị ka egosiri na foto 2).A na-eme diaphragm ka ọ bụrụ iko, na ala nke iko ahụ bụ akụkụ nke na-ebu ike dị n'èzí, a na-emekwa akwa nrụgide na ala nke iko ahụ.A na-eji otu ihe ahụ silicon otu ihe kristal mee pedestal mgbanaka, wee jikọta diaphragm na pedestal.Ụdị ihe mmetụta nrụgide a nwere uru nke ịdị elu dị elu, obere olu na ike siri ike, ma ejiriwo ya mee ihe n'ọtụtụ ebe na ụgbọ elu, igodo oghere, ngwá ọrụ akpaaka na ngwa ahụike.